Reticle Macro Inspection
▪ Particle inspection on all area of reticle :
- Pellicle, Pellicle Frame, Pattern, Backside
▪ Multi scanning with vertical and oblique optical system
▪ Inspection of various reticles with 1 recipe
- No prior work for each mask needed
▪ Applicable to full automation
▪ 0.5um pinhole/particle detection in non-pattern area
▪ Optional function to distinguish particle position at top/bottom of pellicle
▪ Verifying review module included