Auto Scope System
▪ Verify Rework System(VRS) :
- Camera : Color Verification 1M Area Camera
- Scope : 5X, 10X, 20X, 50X, 100X, 150X
▪ Auto Focus
- Focus Sensor : ADS (ATI Depth Sensor)
- Repeatability : 1um@3σ
▪ Function
- Auto Focus
- Image Saving
- CD Measurement
- KLARF / MAP File Automation