- Polish, PSS, Epi, LED FAB process Monitoring & Inspection
- Inspection for LED Wafer Pre-alignment & LED Wafer Macro with Camera
- Using 8 Load Ports, Long Time Automatic Inspection and Sorting Function by Grade is Available.
▪ Inspection Item
- Polish : Pit, Particle
- PR : FM, Scratch, Particle
- PSS : FM Residue, No Pattern, Particle
- Epi : Pit, Pinhole, Press NG, Particle
- FAB : Pad defect, Epitaxial Defect, Finger defect, ITO defect, Mesa Line, etc.
