Precision temperature and humidity control system of semiconductor photo process track facility
Low electricity energy saving system
Production based on optimized design (stability and operational convenience)
|
ITEM |
SPECIFICATION |
|
TEMPERATURE CONTROL RANGE |
THC : 20 ~ 25℃ (±0.05 ℃) |
|
HUMIDITY CONTROL RANGE |
THC : 40 ~ 45% (±0.25%) |
|
FLOW RATE |
88.5 ℓ/min |
|
WIND SPEED |
61㎥/min |
