System that uses electrical heater to heat waste gas generated from semiconductor manufacturing process above the natural ignition point to treat toxic gas.
Combustible and water soluble gas treatment using high temperature heater
Lower operating cost compared to the burn & plasma type
|
ITEM |
SPECIFICATION |
|
Dimension(W x D x H) |
750mm x 700mm x 1600mm |
|
Power |
208 VAC, 3 Phase, 8kW |
|
Capacity |
300 SLM |
|
Utilities |
N2, CDA, CW |
