System that removes waste gas generated from semiconductor manufacturing process using resin components and through physical and chemical adsorption below TLV value and purifies the gas and changes it into non-hazardous gas.
Efficient target gas adsorption using resin
CW unused (save UT)
|
ITEM |
SPECIFICATION |
|
Dimension(W x D x H) |
740mm x 750mm x 1600mm |
|
Power |
100~220 VAC, One Phase, 50~60Hz, 3A |
|
Capacity |
200 SLM |
|
Utilities |
N2 |
