Stocker
The storage system that carry and store various carriers (POD, FOUP, Cassette, M/Z, Tray) and store and retrieve automatically.
Equipment type

| Classification | Specifications |
|---|---|
| Carriers | FOUP / FOSB Magazine Cassette JEDEC Tray |
| Tact Time | Avg.18 sec |
| Total Accuracy | ±0.5mm |
| Robot | 4 Axes Servo System |
| Teaching Method | Auto Teaching |
| Control method | PC Control |
| Networking | SECS/GEM |
| Source of electric power service | AC220V three phase, single phase UPS |
| Cleanliness | 1,000 Class |