Stocker
The storage system that carry and store various carriers (POD, FOUP, Cassette, M/Z, Tray) and store and retrieve automatically.
Equipment type
Classification | Specifications |
---|---|
Carriers | FOUP / FOSB Magazine Cassette JEDEC Tray |
Tact Time | Avg.18 sec |
Total Accuracy | ±0.5mm |
Robot | 4 Axes Servo System |
Teaching Method | Auto Teaching |
Control method | PC Control |
Networking | SECS/GEM |
Source of electric power service | AC220V three phase, single phase UPS |
Cleanliness | 1,000 Class |