Production of modules for FPD manufacturing equipment
Research and production of customized modules for TFT production equipment (Deposition/Etch)
For TFT Line
- TFT-PECVD Module Line System
- TFT-Sputter Module Line System
- TFT-Dry Etch Module Line System
Clean Conveyor System
- Magnetic Conveyor
- Diverter / Turning Device
- Centering / Turning Tilting Device
- Shuttle Worth Clean Conveyor
- Clean Line for Wafer / FPD Series