Blue Cord

Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more

Inquiry

Overview
Products
Documents

Name	EFEM
Series	Semiconductor Equipment

Product Description

제품개요
300mm EFEM은 Track장비, Wet Etcher등 반도체 전공정 장비의 Wafer Loading & Unloading 을 수행하는 장비이다.

SPECIFICATION
- 2~4 Load Port in Front (Customized Product)
- Semi Standard Compliance
- Linear Track for Wafer Transfer Robot Traveling
- Easy Operating & Maintenance
- PIO Sensor & RFID Read / Write
- Enclose Structure
- Fastest cycle time (High throughput)
- Wafer Cooling
- Communications : SECS I / SECS II / GEM

Products of Blue Cord