Description
Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.
Specification
|
Axis |
||
| Work area |
520mm X 520mm X 6mm(Z) X 360deg(T) |
|
| Guide |
Air bearing |
|
| Load mass |
20kg |
|
| Acceleration |
2m/sec² |
|
| Position accuracy(보정후) |
1㎛ |
|
| Repeatability |
±0.5㎛ |
|
| Speed ripple |
0.1%, at 100mm/sec |
|
| T axis, Z axis |
DD Motor, wedge type |
|
| Applications |
Solar cell, Wafer Equipment, etc. |
|
