Specification
|
Axis |
X₁, X₂ |
Y |
| Work area |
800mm |
920mm |
| Guide |
Air bearing |
|
| Load mass |
200kg/T axis |
|
| Speed |
0.5m/sec |
|
| Acceleration |
1m/sec² |
|
| Position accuracy (보정후) |
2㎛ |
|
| Repeatability |
±1㎛ |
|
| Straightness |
6㎛ |
- |
| Speed ripple |
0.1%, at 0.1m/sec |
|
| T axis |
Ball screw & R guide ±3degree |
|
| Applications |
Laser processing, LCD pattern inspection |
|
