Description
- Stroke : 2,100mm×2,100mm
- In-position stability : ±0.05㎛
- Repeatability :±1㎛
Specification
|
Axis |
X₁~ X₄ |
Y₁~ Y12 |
| Work area |
2,100mm |
2,100mm |
| Guide |
LM Bearing |
|
| Load mass |
40kg(Head) |
|
| Speed |
500mm/sec |
|
| Acceleration |
1m/sec² |
|
| Position accuracy(보정후) |
10㎛ |
|
| Repeatability |
±1㎛ |
|
| Option | ||
| Applications |
LCD height measurement equipment etc |
|
