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Blue Cord

Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
Name

Wafer Sorter 200/300

Series Semiconductor Equipment
Product Description
WAFER SORTER 200제품개요SPECIFICATION






Wafer Sorter 200은 200mm 반도체 공장에서 Wafer Aligning 및 ID Reading후, 각 Recipe에 의해 Wafer를 원하는 위치로 Sorting 하는 기능의 장비이다.



- Semi Standard Compliance
- 2~6 Cassette Stage (Customized Product)
- Bluecord's Wafer Pre-Aligner
- Wafer Transfer Robot (Vacuum Type)
- Wafer ID Reader (Front & Back side)
- Easy Operating & Maintenance
WAFER SORTER 300
제품개요
SPECIFICATION





Wafer Sorter 300은 300mm 반도체 공장에서 Wafer Aligning 및 ID Reading후, 각 Recipe에 의해 Wafer를 원하는 위치로 Sorting 하는 기능의 장비이다.

- Semi Standard Compliance
- 2~4 Load Port in Front (Customized Product)
- Wafer Transfer Robot (Vacuum or Edge Grip Hand)
- Bluecord's Wafer Pre-Aligner & FFU
- Front & Back Side Wafer ID Reading
- Easy Operating & Maintenance
- OHT & AGV Available
- Color Touch Screen
- Communications : SECS I / SECS II / GEM