The related actual performance

ㆍWafer Solar Cell & L/L & UL/L Chamber 17 set 

ㆍOuter Chamber 2 set 

ㆍ5G Solar Cell Sputter Chamber 1 set 

ㆍ5G Steel Chamber 1 set 

ㆍ6G Solar Cell Sputter CRS & Gate Valve 2 set 

ㆍ6G Solar Cell BU Chamber & Parts 15 set 

ㆍ6G Solar Cell Sputter Chamber 1 set 

ㆍ8G TC & L/L Chamber 5 set