The related actual performance

ㆍ5G Disk Sputter Chamber 11 set 

ㆍ5G TC & L/L Chamber 3 set 

ㆍ5.5G LCD Sputter Chamber 13 set 

ㆍ6G PDP Sputter & L/L Chamber 6 set 

ㆍ6G SP Chamber & PMC Body for LCD 15 set 

ㆍ6G TM & L/L Chamber 9 set 
 
ㆍ7G L/L Chamber 6 set 
 
ㆍ7G TM & L/L Chamber 3 set 

ㆍ8G L/L Chamber 5 set 
 
ㆍ8G TM & L/L Chamber 8 set 

ㆍ8G Color Filter Sputter Line 1 set 

ㆍ8G LCD Extension Sputter 2 set 
 
ㆍ8G LCD TFT Sputter 2 set 
 
ㆍ8G AL L/L Chamber 5 set 
 
ㆍ8G Manual Chamber 1 set 

ㆍ8G MOCVD Chamber 1 set 

ㆍ8G PE-CVD Chamber 1 set 
 
ㆍ8.5G TM Chamber 16 set 

ㆍ8.5G L/L & Pre-Heating Chamber 5 set