The related actual performance

ㆍ4G Lami & Peeling Chamber 3 set 

ㆍ5.5G TM Chamber 1 set 
 
ㆍ5.5G ENCAP System 4 set 
 
ㆍ5.5G Baking System 2 set 
 
ㆍ5.5G L/L & Turn Chamber 1 set 
 
ㆍ5.5G TC & L/L Chamber 52 set