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SNU Precision

Equipment for manufacturing Semi conductor and LCD products manufacturer
Name

Si Thin Film Solar Cell System (a-Si)

Series Solar Photovoltaic
Product Description
Summary

Si Thin Film Solar Cell System For R&D

Features

- Independent chamber for p-, i-, n- layer
- a-Si, Si oxide, Si nitride using SiH4 or TEOS gas
- Choice of number of chambers to scale production   throughput
- Batch approach for large throughput
- Rapid load lock to meet fast process cycle

Application Solar Cell
Description

Si Thin Film Solar Cell P/I/N layer deposition system