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SNU Precision

Equipment for manufacturing Semi conductor and LCD products manufacturer
Model SIS-1200 Plus
Series Optical Measurement
Product Description

Description SNU Precision  SIS-1200 Plus

Using Enhanced Phase Scanning Interferometry,the Interscan Series
SIS-1200 Provides High Resolution, Precise Surface Measurement and Surface Parameters Characterization  

 

Sample Stage Manual: X,Y,Z,Tip/Tilt
Objective Mounting Single Mount Adapter
Stage Stroke X: 150mm, Y:100mm
Tip/Tilt :±3℃
Z: 50mm
Vertical Resolution Up to 0.1 nm
Option Manual 5-Position Indexing Turret
Lens : 2.5X, 5X, 10X, 20X, 50X
Step Height Standard, Lateral Calibration Standard