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SNU Precision

Equipment for manufacturing Semi conductor and LCD products manufacturer
Model SIS-1200
Series Optical Measurement
Product Description

Description SNU Precision  SIS-1200

Using Enhanced Phase Scanning Interferometry, the Interscan Series SIS-2000 Provides High Resolution, Precise Surface Measurement and Surface Parameters Characterization SNU Precision  SIS-1200 1  

 

Sample Stage Manual: X, Y, Z, Tip/Tilt
Objective Mounting Manual 5-Position Indexing Turret
Stage Stroke X,Y : 200mm
Tip/Tilt :±3℃
Z: 100mm
Vertical Resolution Up to 0.1 nm
Option Auto 5-Position Indexing Turret
Lens : 2.5X, 5X, 10X, 20X, 50X
Step Height Standard, Lateral Calibration Standard