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NewmaTech

Semi conductor chip material processor, Slicing, Wrapping, Polishing, Abrasive, Subsidiary materials
Name

Profile Measurement System (PMS)

Series Lapping & Polishing
Product Description

ㆍPMS (Profile Measurement System) aims to monitor and control the shape of the lapping and polishing plates

ㆍThe profile image is displayed on a computer monitor allowing effective management of straightness and shape.

ㆍEssential item to control the shape of Lapping and Polishing plate        

 

Measurment Precison
(Condition:Room Temp.20±1℃、Humidity 60±5% max.)

Measurment Precison±5μm

(HSS-1400 or more is accuracy by the master correction)
Precision when repeating±3μm

Standard Measurment Points

1000 points (possible 5000 points max.)

Sensor Move Speed(fixed)

30mm/sec.(motor speed)

Data-processing time

Whitin 1minute (processing time at auto,atic setup)

(Processing speed may change according to the PC's processing capablitity)

Sensor Mesurment system Contact type linear gauge
Mesurment range 0~10mm
Sensor contact pressure 150gf
Sensor resolution 1μm