METALLION ™ is the surface coating equipment which utilizes an arc discharge, ion plating.
System Specification
Chamber Size | Ø1000×H1200, Custom-made |
Jig System | 2 fold or 3 fold |
Working Gas | Mass flow control system Ar · N2 · etc |
Plasma Source | 5" Cathodic Arc Source (Auto trigger, Direct Water Cooling) |
The Initial Vaccum Degree |
~10-6Torr |
Bias Power | Pulsed DC |
Heater | Max 480℃ |
Device Operation | Automatic / Semi-automatic |
Advantages
• Can deposit on variety coating films
• High-deposition and ionization rate
• Excellent adhesion on the metal substrate
• High adgesion to the substrate
• High productivity and ease of maintenance
Applications
By selecting the appropriate Target Material TiN, TiCN, TiAlN, AlTiN, CrN, and NANO QUARTET™ coatingm, plenty coatings are available.