Description 
Using Enhanced Phase Scanning Interferometry,the Interscan Series
SIS-1200 Provides High Resolution, Precise Surface Measurement and Surface Parameters Characterization
| Sample Stage | Manual: X,Y,Z,Tip/Tilt |
| Objective Mounting | Single Mount Adapter |
| Stage Stroke | X: 150mm, Y:100mm Tip/Tilt :±3℃ Z: 50mm |
| Vertical Resolution | Up to 0.1 nm |
| Option | Manual 5-Position Indexing Turret |
| Lens : 2.5X, 5X, 10X, 20X, 50X Step Height Standard, Lateral Calibration Standard |
