System that decomposes the target gas generated from the semiconductor manufacturing process using extreme high temperature JET using PLASMA
High decomposition efficiency of PFC GAS (99%)
|
ITEM |
SPECIFICATION |
|
Dimension(W x D x H) |
720mm x 850mm x 1680mm |
|
Power |
208 VAC, 3 Phase, 3A |
|
Capacity |
300 SLM |
|
Utilities |
LNG, O2, CW, PCW, CDA, N2 |
