System that processes toxic gas generated from semiconductor manufacturing process using direct flame treatment through LNG combustion
Periodic PM cycle extension using scraper system
Safety certification via safety authentication design
|
ITEM |
SPECIFICATION |
|
Dimension(W x D x H) |
720mm x 850mm x 1680mm |
|
Power |
208 VAC, 3 Phase, 3A |
|
Capacity |
400 SLM |
|
Utilities |
LNG, O2, CW, PCW, CDA, N2 |
