ASFLOW

Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more

Inquiry

Name	Technical Data
Series	Valve

Product Description

Material

SM	Single Melt
DM	Double Melt
VM	VIM/VAR

Chemical Composition

Chemmical Composition (Wt%)	C	Si	Mn	P	S	Ni	Cr	Mo	Cu	AI
SM(VOD)	≤ 0.03	≤ 0.75	≤ 0.80	≤ 0.040	≤ 0.005	12.0 16.0	16.0 18.0	2.0 3.0	≤ 0.50	–
DM(VAR)	≤ 0.01	≤ 0.3	≤ 0.4	≤ 0.03	≤ 0.003	14.5 15.0	16.5 17.0	2.2 2.5	≤ 0.25	≤ 0.01
VM (VIM+VAR)	≤ 0.010	≤ 0.200	≤ 0.050	≤ 0.020	≤ 0.003	14.5 15.0	16.5 17.0	2.2 17.0	≤ 0.20	≤ 0.01

(Standard spec : SEMI F20 – S≤0.01%)

Dimensional Specification

– ASREIN valves meet the end-to-end length and overall envelope.
(Standard spec : SEMA TECH 96063137-ENG)

Specifications

EP	Ra ≤ 5unich	Ry ≤ 0.7㎛
BA	Ra ≤ 10unich	Ry ≤ 3.0 ㎛
AP	Ra ≤ 100unich	Ry ≤ 25 ㎛

He Leak Test

– All valves are 100% helium leak tested. Tests are performed using a helium leak detector machine with a sensitivity of 1×10-9 atmcc/sec

– Inboard Leak Integrity : ≤3×10-9 atmcc/sec
(Standard spec : SEMI F1)

– Leak across the seat : ≤3×10-9 atmcc/sec
(Standard spec : SEMASPEC 90120391B-STD)
* Held for at least 15 seconds.

Particles

for particles≥0.1㎛, contribution ≤20Particles/ft3

for particles≥0.02㎛, contribution ≤75Particles/ft3
(Standard spec : SEMASPEC 90120390-STD)

Moisture Test

– Test procedures per SEMI F58 For low surface area component (valve, regulator), time to recover to baseline from a 200 ppb spike (SEMI F58) is 1 hour.
(Standard spec : SEMI F58)

Reliability

– More than 3 million cycles for pneumatic valves

– More than 100,000 cycles for manual valves.
(Standard spec : SEMASPEC 90120395-STD, SEMASPEC 91060573-STD)

Electropolished Surfaces-Surface Finish

– Surface Defects : maximum 25 for any one location, with maximum average of 15.
(Standard spec : SEMASPEC 90120401-STD)

Electropolished Surfaces-Surface Finish

ASFLOW Technical Data

– Cr to Fe ratio≥2:1

– CrO to FeO ratio≥3:1
(Standard spec : SEMASPEC 90120403-STD)

– The valves meet the oxide layer depth and surface contamination as the depth of the oxide layer≥20 after substration of the carbon layer.

– The carbon layer is layer≤10.

– The Maximum Surface Contamination is according to:

Element	Atomic percentage
Carbon	30.0
Sulfur	1.0
Phosphorus	2.0
silicon	1.5
Nitrogen	2.0

(this test is in accordance with SEMASPEC 91060573-STD)

Cleaning

– All parts are free of emulsion composition and residues involved in the machining process ,and ASREIN Valves are assembled, inspected, tested and packaged in a Class 10 Clean room.