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ASFLOW

Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
Name

Overview

Series Metal Seal Fitting
Product Description

Materials

 

Glands, Bodies

Material Designator Specification
JIS_STD SUS316L(AOD) GM SEMI SPEC
F20-0706E
JIS SPEC CHEMICAL
COMPOSITION
Single Melt SUS316L(VOD) SM
Double Melt SUS316L(VAR) DM
Double Melt SUS316L(VIM+VAR) VM

 

Gaskets

Material Designator Specification
SUS316L 316L ASTM A 167
Nickel Ni ASTM B 162

 

Nut

Material Designator Specification
SUS316/316L 316/316L ASTM A 276
SUS304 304 ASTM A 493 / JIS G 4318

 

Pressure Ratings

All ratings comply with calculations in accordance with ANSI Code for Pressure Piping B31.3,Process Piping.

Working pressure ratings determined at room temperature with gasket materials shown.

 

Plating

Female nuts are plated with silver. Chemical precesses used for cleaning, electropolishing,and passivation may remove plating. Damaged or removed plating may cause thread galling, damage of fitting components and prevention of a proper seal.

 

Packing

All metal seal fittings are double packaged in clean room. (Class 10 and 1000)

Sealing part is protected with a plastic cap(yellow cap for BA, blue cap for EP)

 

Feature

ASFLOW Overview

 

Assembly

ASFLOW Overview  1

 

Cleaning

Passivation in Nitric environment.
Ultra-sonic cleaning with minimum 18MΩ of D.I water after passivation.

 

Testing

Helium leak rate of 1 x 10-9 Torr. ℓ /s
International Standard, SEMI SPEC F1-96

Products of ASFLOW