OVERVIEW

TERA provides both thin film solar cell and bulk crystalline solar cell manufacturing equipment on the basis of technology and experience in mass production obtained from FPD process equipment and semiconductor equipment.
Most importantly, we provide the selenization process equipment for manufacturing CIGS thin film solar cells, and ZnO transparent conductive oxide (TCO) vapor deposition equipment applied to Si, CIGS, and LEDs.  
 
 
CIGS Selenization System

CIGS (Copper Indium Gallium Selenium) solar cells are largely divided into methods of carrying out the co-evaporation of the 4 elements Cu, In, Ga, Se simultaneously (efficiency is high but manufacturing in a large-area has limitations).
Another method is to carry out vapor deposition and heat treatment in selenium-based ambient high temperature after sputtering Copper, Indium, Gallium sequentially.
Cryster®500s of TERA provides equipment to carry out the heat treatment of multiple glass substrates in batch type at a selenium or sulfur-based ambience below 600°C on the basis of the mass production experience of the FPD heat treatment process.
Verified technology for the safety system to control fatally poisonous selenium or sulfur gas ambience, and a sub system to dispose of by-products generated during the process is obtained.

·Applications:  Selenization for the CIGS solar cell

·Bath type of > 20~100 product panels

·Temperature < 600°C

·No glass damage or deformation (Tera's proprietary warp free technology)

·Complete chamber sealing for ambient control & safety

·Innovative injector design

·Proprietary safety Protocols for H2Se and H2S
 

TCO MOCVD

Both Si and CIGS type thin film solar cell should essentially use transparent conductive oxide.
BZO (Boron-doped Zinc Oxide) has a low production cost compared with FTO (F-doped Tin Oxide). Therefore, for Si type thin film solar cells, BZO has been replacing FTO.
BZO also can be used for in-house development while sputter damage is minimized. This is a more viable alternative for CIGS solar cell manufacturers applying sputter-based AZO.
TERA’s Quadra MOCVD equipment offers the solution for Si and CIGS type solar cell’s TCO vapor deposition process.  

·Applications: Transparent conductive oxide for Si, CIGS solar cells and LEDs

·Single Chamber integrated Cluster type (Max 5 Chambers)

·Low temperature Al heater, covered by susceptor

·Tera's simple Dual Shower-Head structure (isolation of Zinc and HO before gas reaction on glass)

·MO Source supply system