Description 
Using Enhanced Phase Scanning Interferometry, the Interscan Series SIS-2000 Provides High Resolution, Precise Surface Measurement and Surface Parameters Characterization
| Sample Stage | Manual: X, Y, Z, Tip/Tilt |
| Objective Mounting | Manual 5-Position Indexing Turret |
| Stage Stroke | X,Y : 200mm Tip/Tilt :±3℃ Z: 100mm |
| Vertical Resolution | Up to 0.1 nm |
| Option | Auto 5-Position Indexing Turret |
| Lens : 2.5X, 5X, 10X, 20X, 50X Step Height Standard, Lateral Calibration Standard |
