Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes
specification
| Type | PC control semi auto |
|---|---|
| Mask size | up to 7" x 7" |
| Substrate size | piece to 6" |
| UV lamp & Power | 350W & power supply |
| Uniform beam size | 6.25" x 6.25" |
| Beam Uniformity | <±4% |
| Beam wavelength | 350 ~ 450nm |
| 365nm Intensity | ~25mW/cm2 |
| Alignment accuracy | 1um |
| Process resolution | 0.8um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y,z & θ |
| Options | Anti-Vibration table |
| CCD BSA | |
| UV Intensity meter | |
| UV-LED(365nm) exposure module | |
| etc. |
