Easy operation & Installation
Handling Substrates of Various sizes
Adopt UV-LED exposure module
UV-LED Life-time is long
specification
| Type | Fully manual (Mask Aligner) |
|---|---|
| Mask size | up to 5" x 5" |
| Substrate size | piece to 4" dia |
| UV lamp & Power | UV-LED & power supply |
| Uniform beam size | 125mm dia |
| Beam Uniformity | <±3% |
| Beam wavelength | 365nm Only |
| 365nm Intensity | ~20mW/cm2 |
| Alignment accuracy | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y,z & θ |
| Options | etc. |
