▷ Fully Automation system, Providing various technology and provides expandability for providing stable quality
▷ Offers high mobility, maximize productivity
Application
- Applied to various thin film (Metal, Oxide, TCO) process
- Applied to various products (Plastic, Glass, etc.)
- Applied to various shapes (Deco, Tool, Special model)
Specification
| Configuration | Loading, Pre-treatment, Deposition, Buffer, Unloading |
| Tact time | In 3 Min |
| Cathode | Planar or Cylindrical Magnetron cathode |
| Target | Metal, Oxide, TCO |
