▷ Suitable for the automated production line and Research & Development system.
▷ It provides a highly integrated Technology and Mechanism
Application
- Applied to various thin film (Metal, Oxide, TCO) process
- Highly integrated semiconductor and
- electronic components substrate processing
- Thin-film solar cell manufacturing process
Specification
| Configuration | Loading, Transfer, Pre-treatment, Deposition(PVD, CVD) |
| Transfer | Hi-vacuum automatic robot |
| Cathode | Planar or Round Magnetron cathode |
| Target | Metal, Oxide, TCO |
