General Specifications

ㆍBody Material : Stainless Steel 
ㆍVibration : < 0.35 m/s² 
ㆍLeak rate : < 6 x 10-8mbar.l/s 
ㆍOperation : 3~8 bar 
ㆍWarranty : 100,000 Cycle

Customer Option : O-Ring Feedthrough or Magnet Seal Feedthrough
Application Port Dimension : ISO40 ~ ISO320
Application Process : TiCL4, BPSG, Nitride, Wsi, All Toxic Process...