Features 

ㆍVery Low Noise & Vibration 
ㆍProtective Bellow 
ㆍVery Compact Design 
ㆍLonger Lifetime 
ㆍVery High Purity Valve

General Specifications

ㆍBody Material : Stainless Steel 
ㆍLeak rate : < 6 x 10-8mbar.l/s 
ㆍOperation : 3~8 bar 
ㆍWarranty : 100,000 Cycle

Application Port Dimension : ISO40 ~ ISO320
Application Process : TiCL4, BPSG, Nitride, Wsi, All Toxic Process...