-
Asher
-
Microwave Asher
Asher
SMA 601
-
Coating Service
-
Coating Service
Coating Service
-
CVD
-
PECVD System for SiOx/SiNx/a-Si
CVD
SPC 601
-
Anti-stiction Layer Coating System
CVD
SVS Series
-
PECVD System for SiOx/SiNx/a-Si/DLC
CVD
SPC 603
-
Etcher
-
ICP-RIE PSS Etcher for HBLED
Etcher
SIE 2031
-
ICP Etcher
Etcher
SIE 601
-
RIE Etcher
Etcher
SRE 601
-
Evaporator
-
Evaporation System for Thing film deposition, etc.
Evaporator
SE 805
-
E-Beam & High Performance Ion Gun Combination
Evaporator
SE 805G
-
Sputter
-
Cluster Sputter with Multi Target Chamber
Sputter
SCS 110
-
Cluster Sputter with Multi Target Chamber
Sputter
SSLS 120
-
Multi Purpose 1:1 Direct Sputtering System with Multi Target
Sputter
SSLS 130
-
Vertical Inline Sputtering System
Sputter
SVIS G8
-
Sputter
SHTR W900