Product Outline

As the system is used in lithography, the system coats wafers with photoresist and develop patterns on wafer with develop liquid. 
  
Basic Information
 
ㆍAutomatic 2 sizes of wafer process at the same time.
ㆍSEMI-S2 certification
ㆍVarious process application(LED, MEMS, Bumping, GaAs, Glass, Quartz…)
ㆍMulti process flow
ㆍFlexible system configuration
ㆍHigh productivity and stability
ㆍDesign patent