Product Outline
This system coats wafer surface with spray type for special process.
Basic Information
ㆍThis system is used in many kinds of special coating process including MEMS process and includes both coating function of top/back side.
Name |
Spray Coater |
Series | Wafer Equipment |
Product Outline
This system coats wafer surface with spray type for special process.
Basic Information
ㆍThis system is used in many kinds of special coating process including MEMS process and includes both coating function of top/back side.