Ceria slurry supply system

Line up : Ceria Slurry/Additive supply System 1set, Bottle shaker 1set,IMS Control Panel 1set, IMS Module 4set
CMP for the up to 0.15㎛ device
SEMI Certificate (SEMI S2-0200)
Panel Computer keeps 200 kinds of Alarm and History for 3 months
The state-of-the-art flow rate and pressure control
Load cell control
Adjustable mixing rate : Ceria: DIW=1.0~10
Adjustable flow rate : 25cc~125cc±1cc or 50cc~250±2cc
Slurry and Additive or Slurry only

Slurry Supply System (Oxide, Metal, Copper Slurry)

- Optimized Material & Configuration
- Competitive Price
- Dip Tube & Dispenser Head Automatic Cleaning
- Mixing Rate: Density or H2O2 Concentration Monitoring
- The Humidifier minimize the agglomeration of slurry
- Valve leak detection manifold

Mixing Supply System

- Perform: HF, NH4OH,SC-1,Developer etc. 
- Optimized Material & Configuration 
- All-in-one System
- Size(W×D×H): 1800×1500×2000 
- Quality criterion :Concentration meter
- The compensation of the instant power failure up to one (1) second.
- The fire extinguisher system for flammable solvent containment cabinet
- Barcode system for identification of chemical and prevention of - misusage.
- Dual Emergency stop switch for maximum safety.
- Primary stainless steel tubing with Ra = 10 or better is required.
- Intrinsically safe components and design are required for the solvent supply systems.
 

CCSS(Central Chemical Supply System)