| Name |
PECVD System for SiOx/SiNx/a-Si |
| Model | SPC 601 |
| Series | CVD |
Product Description
Products of Sorona
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Asher
-
Microwave Asher
Asher
SMA 601
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Coating Service
-
Coating Service
Coating Service
-
CVD
-
PECVD System for SiOx/SiNx/a-Si
CVD
SPC 601
-
Anti-stiction Layer Coating System
CVD
SVS Series
-
PECVD System for SiOx/SiNx/a-Si/DLC
CVD
SPC 603
-
Etcher
-
ICP-RIE PSS Etcher for HBLED
Etcher
SIE 2031
-
ICP Etcher
Etcher
SIE 601
-
RIE Etcher
Etcher
SRE 601
-
Evaporator
-
Evaporation System for Thing film deposition, etc.
Evaporator
SE 805
-
E-Beam & High Performance Ion Gun Combination
Evaporator
SE 805G
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Sputter
-
Cluster Sputter with Multi Target Chamber
Sputter
SCS 110
-
Cluster Sputter with Multi Target Chamber
Sputter
SSLS 120
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Multi Purpose 1:1 Direct Sputtering System with Multi Target
Sputter
SSLS 130
-
Vertical Inline Sputtering System
Sputter
SVIS G8
-
Sputter
SHTR W900