Construction type
■ Features
- Incorportate an ejector stage as well as the full fractionation jets.
- Incorportate insulated jet drip shields which prevent re-boiling of oil droplets outside the jet assembly.
■ Application
- Analytical instruments
- Optics
- Coating, ornamental
- Pharmaceuticals
- R&D laboratories
Dimension
Specification
Model | WSDP-4 | WSDP-8 | WSDP-10 | WSDP-15 | WSDP-18 | WSDP-22 | WSDP-28 | Features |
Pumping speed [l/sec] | 600 | 2000 | 3000 | 5000 | 9000 | 12000 | 25000 | -보수점검 용이 |
Ultimate pressure [Torr] | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
Inlet size [inch] | 4 | 8 | 10 | 15 | 18 | 22 | 28 | |
Oulet size [inch] | 1 | 1 1/2 | 2 | 2 1/2 | 4 | 6 | 6 | |
Power [kW] | 0.7 | 2 | 3 | 6 | 5.4(6.5) | 6(8) | 9(13) | |
Warm-up time [min] | 15 | 20 | 22 | 25 | 30 | 35 | 40 |
▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps
Type | F100/110 | F100/110T | FX100/110D | ||||
UHV Flange | DN100LF | DN100CF | DN100LF | DN100CF | DN100LF | DN100CF | |
Order No. | |||||||
Pumping Speed (L/s) | 110 | 110 | 110 | ||||
Compression Ratio | N2: | >108 | >108 | >108 | |||
H2: | 5x102 | 5x102 | 5x102 | ||||
Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF25 | KF25 | KF25 | ||||
Bearing | Metal Ball Bearings | Ceramic Ball Bearing | |||||
Start-up Time(min) | <2 | <2 | <2 | ||||
Rotational Speed(rpm) | 42300 | 42300 | 42300 | ||||
Cooling Rquirements | Water&Air | Water&Air | Water&Air | ||||
Operating Position | Vertical Or Horizonal | Vertical Or Horizonal | Vertical Or Horizonal | ||||
Weight(Kg) | 8 | 8 | 8 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps
Type | F160/450 | F160/450T | F160/450N | ||||
UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
Order No. | |||||||
Pumping Speed (L/s) | 450 | 450 | 450 | ||||
Compression Ratio | N2: | >108 | >108 | >108 | |||
H2: | 103 | 103 | 103 | ||||
Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF40 | KF40 | KF40 | ||||
Bearing | Metal Ball Bearings | Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
Start-up Time(min) | <5 | <5 | <5 | ||||
Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
Cooling Rquirements | Water | Water | Water | ||||
Operating Position | Vertical ±5° | Vertical ±5° | Vertical ±5° | ||||
Weight(Kg) | 30 | 30 | 30 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ F160/450, F160/450T, F160/450N Turbomolecular Pumps
Type | F160/620 | F160/620Z | F160/620N | ||||
UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
Order No. | |||||||
Pumping Speed (L/s) | 600 | 600 | 600 | ||||
Compression Ratio | N2: | >109 | >109 | >109 | |||
H2: | 6x103 | 6x103 | 6x103 | ||||
>Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF40 | KF40 | KF40 | ||||
Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
Start-up Time(min) | <5 | <5 | <5 | ||||
Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
Cooling Rquirements | Water | Water | Water | ||||
Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
Weight(Kg) | 32 | 32 | 32 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ F160/620, FF160/620Z, FF160/620N Compound Molecular Pumps
Type | FF160/800 | FF160/800Z | FF160/800N | ||||
UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
Order No. | |||||||
Pumping Speed (L/s) | 800 | 800 | 800 | ||||
Compression Ratio | N2: | >109 | >109 | >109 | |||
H2: | 6x103 | 6x103 | 6x103 | ||||
Ultimate Vacuum(Pa)> | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF40 | KF40 | KF40 | ||||
Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
Start-up Time(min) | <5 | <5 | <5 | ||||
Rotational Speed(rpm) | 27000 | 27000 | 27000 | ||||
Cooling Rquirements | Water | Water | Water | ||||
Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
Weight(Kg) | 35 | 35 | 35 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ FF160/800, FF160/800T, FF160/800N Compound Molecular Pumps
Type | FF200/1200 | FF200/1200Z | FF200/1200N | ||||
UHV Flange | DN200LF | DN200CF | DN200LF | DN200CF | DN200LF | DN200CF | |
Order No. | |||||||
Pumping Speed (L/s) | 1200 | 1200 | 1200 | ||||
Compression Ratio | N2: | >109 | >109 | >109 | |||
H2: | 6x103 | 6x103 | 6x103 | ||||
Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF40 | KF40 | KF40 | ||||
Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
Start-up Time(min) | <5 | <5 | <5 | ||||
Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
Cooling Rquirements | Water | Water | Water | ||||
Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
Weight(Kg) | 45 | 45 | 45 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ FF200/1200, FF200/1200T, FF200/1200N Compound Molecular Pumps
Type | F250/1500 | F250/1500T | F250/1500N | ||||
UHV Flange | DN250LF | DN250CF | DN250LF | DN250CF | DN250LF | DN250CF | |
Order No. | |||||||
Pumping Speed (L/s) | 1500 | 1500 | 1500 | ||||
Compression Ratio | N2: | >108 | >108 | >108 | |||
H2: | 5x102 | 5x102 | 5x102 | ||||
Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
6x10-6 | 6x10-6 | 6x10-6 | |||||
6x10-7 | 6x10-7 | 6x10-7 | |||||
Output Flange | KF50 | KF50 | KF50 | ||||
Bearing | Metal Ball Bearings | Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
Start-up Time(min) | <8 | <8 | <8 | ||||
Rotational Speed(rpm) | 21000 | 21000 | 21000 | ||||
Cooling Rquirements | Water | Water | Water | ||||
Operating Position | Vertical ±5° | Vertical ±5° | Vertical ±5° | ||||
Weight(Kg) | 60 | 60 | 60 | ||||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |
▶ F250/1500, F250/1500T, F250/1500N Turbomolecular Pumps
Type | F400/3500 | F400/3500T | |||
UHV Flange | DN400LF | DN400LF | |||
Order No. | |||||
Pumping Speed (L/s) | 3500 | 3500 | |||
Compression Ratio | N2: | >108 | >108 | ||
H2: | 5x102 | 5x102 | |||
Ultimate Vacuum(Pa) | 6x10-6 | 6x10-7* | 6x10-6 | 6x10-7* | |
Output Flange | LF100 | LF100 | |||
Bearing | Ceramic Ball Bearing | Ceramic Ball Bearing | |||
Start-up Time(min) | <35 | <35 | |||
Rotational Speed(rpm) | 13500 | 13500 | |||
Cooling Rquirements | Water | Water | |||
Operating Position | Vertical ±5° | Vertical ±5° | |||
Weight(Kg) | 90 | 90 | |||
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump. |